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Substrate transporter and substrate processing apparatus including substrate transporter |
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Polishing unit, substrate processing apparatus, and polishing method |
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Kenichi Kobayashi, Kenichi Akazawa |
2020-03-17 |
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Reversing machine and substrate polishing apparatus |
Kenichi Akazawa, Kenichi Kobayashi, Manao Hoshina |
2020-01-07 |
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Plating apparatus |
Kenichi Kobayashi, Yasuyuki MIYASAWA, Tsuyoshi Soma |
2019-12-17 |
| 10354900 |
Substrate transfer apparatus and substrate transfer method |
Kenichi Kobayashi, Takahiro Nanjo, Hiroyuki Takenaka |
2019-07-16 |
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Calibration apparatus and calibration method |
Kenichi Kobayashi |
2018-09-11 |
| 8128458 |
Polishing apparatus and substrate processing method |
Kenichiro Saito, Masanori Sasaki, Takashi Mitsuya |
2012-03-06 |
| 6824613 |
Substrate processing apparatus |
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