Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Kenichi Akazawa, Fong-Jie Du +5 more | 2025-02-25 |
| 11260493 | Substrate processing apparatus and control method | Minoru Harada, Hiroyuki Takenaka, Naoki Matsuda | 2022-03-01 |
| 10354900 | Substrate transfer apparatus and substrate transfer method | Akihiro Yazawa, Kenichi Kobayashi, Hiroyuki Takenaka | 2019-07-16 |
| 7208074 | Substrate processing apparatus and substrate plating apparatus | Koji Mishima, Junji Kunisawa, Natsuki Makino, Norio Kimura, Hiroaki Inoue +3 more | 2007-04-24 |
| 6689257 | Substrate processing apparatus and substrate plating apparatus | Koji Mishima, Junji Kunisawa, Natsuki Makino, Norio Kimura, Hiroaki Inoue +3 more | 2004-02-10 |
| 6092542 | Cleaning apparatus | Naoki Matsuda, Yoshiyuki Ohta, Kenya Ito | 2000-07-25 |