Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403507 | Transfer apparatus, cleaning module, and substrate processing apparatus | Asagi Matsugu, Akihiro Yazawa, Manato Furusawa, Hideharu Aoyama, Ayumu Saito +4 more | 2025-09-02 |
| 10632588 | Polishing apparatus and pressing pad for pressing polishing tool | Masayuki Nakanishi, Kenji Kodera | 2020-04-28 |
| 10508355 | Plating apparatus | Akihiro Yazawa, Kenichi Kobayashi, Tsuyoshi Soma | 2019-12-17 |
| D851141 | Pressing member for substrate polishing apparatus | Kenji Kamimura, Masayuki Nakanishi, Satoru Yamamoto, Kenji Kodera | 2019-06-11 |
| D851140 | Pressing member for substrate polishing apparatus | Kenji Kamimura, Masayuki Nakanishi, Satoru Yamamoto, Kenji Kodera | 2019-06-11 |
| D851142 | Pressing member for substrate polishing apparatus | Kenji Kamimura, Masayuki Nakanishi, Satoru Yamamoto, Kenji Kodera | 2019-06-11 |
| D834075 | Pressing member for substrate polishing apparatus | Kenji Kamimura, Masayuki Nakanishi, Satoru Yamamoto, Kenji Kodera | 2018-11-20 |