Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11625811 | Adaptive non-rigid targeted deformation of images for synthetic image generation | Abhinav Kumar, Benjamin Schwarz | 2023-04-11 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy Shang +2 more | 2023-01-03 |
| 11227193 | Automated image measurement for process development and optimization | Abhinav Kumar, Benjamin Schwarz | 2022-01-18 |
| 10963753 | Automated image measurement for process development and optimization | Abhinav Kumar, Benjamin Schwarz | 2021-03-30 |
| 10963990 | Automated image measurement for process development and optimization | Abhinav Kumar, Benjamin Schwarz | 2021-03-30 |
| 8721798 | Methods for processing substrates in process systems having shared resources | James P. Cruse, Dermot Cantwell, Ming Xu, Benjamin Schwarz, Kenneth S. Collins +3 more | 2014-05-13 |
| 8527081 | Method and apparatus for automated validation of semiconductor process recipes | Roger Alan Lindley | 2013-09-03 |
| 8496756 | Methods for processing substrates in process systems having shared resources | James P. Cruse, Dermot Cantwell, Ming Xu, Benjamin Schwarz, Kenneth S. Collins +3 more | 2013-07-30 |
| 8473247 | Methods for monitoring processing equipment | James P. Cruse, Dermot Cantwell, Michael R. Rice, Thorsten Kril | 2013-06-25 |
| 8097088 | Methods for processing substrates in a dual chamber processing system having shared resources | Eu Jin Lim, Adauto Diaz, Benjamin Schwarz, James P. Cruse | 2012-01-17 |
| 4915668 | Boat tunnel apparatus and method | — | 1990-04-10 |