Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7144816 | Polysilicon opening polish | Mark L. Doczy | 2006-12-05 |
| 7138323 | Planarizing a semiconductor structure to form replacement metal gates | Jack T. Kavalieros, Justin K. Brask, Mark L. Doczy, Uday Shah, Matthew V. Metz +2 more | 2006-11-21 |
| 7126199 | Multilayer metal gate electrode | Mark L. Doczy, Justin K. Brask, Jack T. Kavalieros, Matthew V. Metz, Suman Datta +1 more | 2006-10-24 |
| 7109557 | Sacrificial dielectric planarization layer | Kevin P. O'Brien, Anne Miller | 2006-09-19 |
| 7078282 | Replacement gate flow facilitating high yield and incorporation of etch stop layers and/or stressed films | Robert S. Chau, Justin K. Brask, Scott A. Hareland | 2006-07-18 |
| 7045428 | Method for making a semiconductor device with a high-k gate dielectric and a conductor that facilitates current flow across a P/N junction | Justin K. Brask, Jack T. Kavalieros, Mark L. Doczy, Matthew V. Metz, Uday Shah +3 more | 2006-05-16 |
| 7018918 | Method of forming a selectively converted inter-layer dielectric using a porogen material | Grant Kloster, Kevin P. O'Brien, Michael Goodner, Jihperng Leu, David H. Gracias +2 more | 2006-03-28 |
| 6972225 | integrating n-type and P-type metal gate transistors | Mark L. Doczy, Justin K. Brask, Steven J. Keating, Brian S. Doyle, Michael L. McSwiney +2 more | 2005-12-06 |
| 6953719 | Integrating n-type and p-type metal gate transistors | Mark L. Doczy, Justin K. Brask, Steven J. Keating, Brian S. Doyle, Michael L. McSwiney +2 more | 2005-10-11 |
| 6943121 | Selectively converted inter-layer dielectric | Jihperng Leu, Grant Kloster, David H. Gracias, Lee Rockford, Peter K. Moon | 2005-09-13 |
| 6908863 | Sacrificial dielectric planarization layer | Kevin P. O'Brien, Anne Miller | 2005-06-21 |
| 6858483 | Integrating n-type and p-type metal gate transistors | Mark L. Doczy, Justin K. Brask, Steven J. Keating, Brian S. Doyle, Michael L. McSwiney +2 more | 2005-02-22 |
| 6743683 | Polysilicon opening polish | Mark L. Doczy | 2004-06-01 |
| 6705928 | Through-pad slurry delivery for chemical-mechanical polish | — | 2004-03-16 |
| 6558562 | Work piece wand and method for processing work pieces using a work piece handling wand | Daniel S. Mallery, Doug Kreager | 2003-05-06 |
| 6464855 | Method and apparatus for electrochemical planarization of a workpiece | Saket Chadda | 2002-10-15 |
| 5851140 | Semiconductor wafer polishing apparatus with a flexible carrier plate | Malek Charif, Kenneth D. Lefton, Fred E. Mitchel | 1998-12-22 |
| 4957357 | Multiple axis reticle | William D. Gunter | 1990-09-18 |