Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6261158 | Multi-step chemical mechanical polishing | Karey Holland, Ajoy Zutshi, Fen Dai, Yehiel Gotkis, C. Jerry Yang +2 more | 2001-07-17 |
| 6056632 | Semiconductor wafer polishing apparatus with a variable polishing force wafer carrier head | John A. Adams, Thomas F. A. Bibby | 2000-05-02 |
| 5851140 | Semiconductor wafer polishing apparatus with a flexible carrier plate | Chris Barns, Malek Charif, Kenneth D. Lefton | 1998-12-22 |