Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7081383 | Method for fabricating memory cells and memory cell array | Franz Kreupl | 2006-07-25 |
| 7074689 | Method for fabricating a trench capacitor having an insulation collar, which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory cell | Harald Seidl | 2006-07-11 |
| 6977405 | Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it | Jorn Lutzen, Bernd Goebel, Dirk Schumann, Harald Seidl, Martin Popp +2 more | 2005-12-20 |
| 6953722 | Method for patterning ceramic layers | Harald Seidl, Thomas Hecht, Stefan Jakschik, Stephan Kudelka, Uwe Schroder +1 more | 2005-10-11 |
| 6949269 | Method for producing vertical patterned layers made of silicon dioxide | Harald Seidl | 2005-09-27 |
| 6916704 | Multiple deposition of metal layers for the fabrication of an upper capacitor electrode of a trench capacitor | Bernhard Sell, Annette Sanger, Harald Seidl | 2005-07-12 |
| 6852640 | Method for fabricating a hard mask | — | 2005-02-08 |
| 6849153 | Removal of post-rie polymer on A1/CU metal line | Ravikumar Ramachandran, Wesley C. Natzle, Hiroyuki Akatsu, Chien-Yi Yu | 2005-02-01 |
| 6835417 | Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes | Annette Saenger, Bernhard Sell, Harald Seidl, Thomas Hecht | 2004-12-28 |
| 6774005 | Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide | Peter Moll, Bernhard Sell, Annette Sanger, Harald Seidl | 2004-08-10 |
| 6693016 | Method of fabricating a trench-structure capacitor device | Thomas Hecht, Matthias Leonhardt, Uwe Schroder, Harald Seidl | 2004-02-17 |
| 6653185 | Method of providing trench walls by using two-step etching processes | Harald Seidl | 2003-11-25 |
| 6579758 | Method and installation for fabricating one-sided buried straps | Bernd Gobel, Alfred Kersch, Werner Steinhogl | 2003-06-17 |
| 6559005 | Method for fabricating capacitor electrodes | Alexander Gschwandtner | 2003-05-06 |
| 6548414 | Method of plasma etching thin films of difficult to dry etch materials | Satish D. Athavale | 2003-04-15 |
| 6455369 | Method for fabricating a trench capacitor | Matthias Forster, Jorn Lutzen, Anja Morgenschweis | 2002-09-24 |
| 6437387 | Memory cell with a stacked capacitor | — | 2002-08-20 |
| 6420099 | Tungsten hard mask for dry etching aluminum-containing layers | Satish D. Athavale | 2002-07-16 |
| 6207524 | Memory cell with a stacked capacitor | — | 2001-03-27 |
| 6207584 | High dielectric constant material deposition to achieve high capacitance | Hua Shen, David E. Kotecki, Robert Benjamin Laibowitz, Katherine L. Saenger, Satish D. Athavale +3 more | 2001-03-27 |
| 6177353 | Metallization etching techniques for reducing post-etch corrosion of metal lines | Peter Strobl, Stephan Wege, Eike Lueken, Georg Stojakovic, Bruno Spuler | 2001-01-23 |
| 6136660 | Stacked capacitator memory cell and method of fabrication | Hua Shen, Gerhard Kunkel | 2000-10-24 |
| 6033977 | Dual damascene structure | Dirk Tobben | 2000-03-07 |
| 5980770 | Removal of post-RIE polymer on Al/Cu metal line | Ravikumar Ramachandran, Wesley C. Natzle, Hiroyuki Akatsu, Chien-Yi Yu | 1999-11-09 |
| 5935873 | Deposition of carbon into nitride layer for improved selectivity of oxide to nitride etchrate for self aligned contact etching | Bruno Spuler, Juergen Wittmann, Wolfgang Bergner, Matthias Ilg | 1999-08-10 |