Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734077 | Method for fabricating a trench capacitor for a semiconductor memory | Matthias Forster, Kristin Schupke, Anett Moll, Jens-Uwe Sachse | 2004-05-11 |
| 6645839 | Method for improving a doping profile for gas phase doping | Moritz Haupt, Dietmar Ottenwalder, Uwe Schroder | 2003-11-11 |
| 6455369 | Method for fabricating a trench capacitor | Matthias Forster, Jorn Lutzen, Martin Gutsche | 2002-09-24 |