Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354684 | Test pattern and method of evaluating the transfer properties of a test pattern | Uwe Dersch | 2008-04-08 |
| 7304721 | Method for dynamically monitoring a reticle | Karin Eggers, Norbert Haase, Andreas Frangen, Carmen Jaehnert | 2007-12-04 |
| 7221788 | Method of inspecting a mask or reticle for detecting a defect, and mask or reticle inspection system | Steffen Schulze | 2007-05-22 |
| 7124379 | Method for communicating a measuring position of a structural element that is to be formed on a mask | Bettine Buechner, Christian Rotsch | 2006-10-17 |
| 7094674 | Method for production of contacts on a wafer | Werner Graf, Johannes Kowalewski, Lars Heineck | 2006-08-22 |
| 7056628 | Mask for projecting a structure pattern onto a semiconductor substrate | Shahid Butt | 2006-06-06 |
| 6756164 | Exposure mask with repaired dummy structure and method of repairing an exposure mask | Torsten Franke, Armin Semmler, Martin Verbeek | 2004-06-29 |
| 6631511 | Generating mask layout data for simulation of lithographic processes | Armin Semmler, Christoph Friedrich | 2003-10-07 |
| 6586308 | Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures | Sabine Kling, Dominique Savignac, Hans-Peter Moll, Elke Hietschold, Ines Anke | 2003-07-01 |
| 6571383 | Semiconductor device fabrication using a photomask designed using modeling and empirical testing | Shahid Butt, Beate Frankowsky | 2003-05-27 |
| 6436585 | Method of using optical proximity effects to create electrically blown fuses with sub-critical dimension neck downs | Chandrasekhar Narayan, Axel Brintzinger, Fred L. Einspruch, Alan C. Thomas | 2002-08-20 |
| 6426269 | Dummy feature reduction using optical proximity effect correction | Heinz Hoenigschmid, Donald J. Samuels | 2002-07-30 |
| 6421820 | Semiconductor device fabrication using a photomask with assist features | Scott M. Mansfield, Lars Liebmann, Shahid Butt | 2002-07-16 |
| 6353248 | Optimized decoupling capacitor using lithographic dummy filler | Armin Reith, Louis L. Hsu, Gunther Lehmann | 2002-03-05 |
| 6232154 | Optimized decoupling capacitor using lithographic dummy filler | Armin Reith, Louis L. Hsu, Gunther Lehmann | 2001-05-15 |