Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446767 | Composite body having at least one functional component, and a method of producing said composite body | Holger Lausch, Mathias Herrmann, Bernd Gronde, Thomas Toeppel, Romy Petters | 2022-09-20 |
| 7385676 | Mask set having separate masks to form different regions of integrated circuit chips, exposure system including the mask set with an aperture device, and method of using the mask set to expose a semiconductor wafer | — | 2008-06-10 |
| 7307715 | Method for the formation of a structure size measured value | — | 2007-12-11 |
| 7124379 | Method for communicating a measuring position of a structural element that is to be formed on a mask | Bettine Buechner, Henning Haffner | 2006-10-17 |
| 6628409 | Method for determining the distance between periodic structures on an integrated circuit or a photomask | — | 2003-09-30 |
| 6552331 | Device and method for combining scanning and imaging methods in checking photomasks | — | 2003-04-22 |