Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7304721 | Method for dynamically monitoring a reticle | Henning Haffner, Karin Eggers, Andreas Frangen, Carmen Jaehnert | 2007-12-04 |
| 7252913 | Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer | Bernd Kochan, Juergen Karl, Michael Kubis | 2007-08-07 |
| 5926282 | Multispectral sensor device | Jens-Peter KNOBLOCH, Andreas Kalz | 1999-07-20 |