Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9058976 | Cleaning composition and process for cleaning semiconductor devices and/or tooling during manufacturing thereof | Vishal Chhabra, Laertis Economikos, John A. Fitzsimmons, Mahmoud Khojasteh, Jennifer V. Muncy | 2015-06-16 |
| 8491806 | Chemical-mechanical polishing formulation and methods of use | James A. Hagan | 2013-07-23 |
| 7214623 | Planarization system and method using a carbonate containing fluid | Donald J. Delehanty, Daniel Heenan, Fen F. Jamin, Laertis Economikos | 2007-05-08 |
| 7056192 | Ceria-based polish processes, and ceria-based slurries | Rajasekhar Venigalla, Timothy M. McCormack, Robert M. Merkling, Jr. | 2006-06-06 |
| 6812193 | Slurry for mechanical polishing (CMP) of metals and use thereof | Michael T. Brigham, Donald F. Canaperi, Michael A. Cobb, William J. Cote, Kenneth M. Davis +9 more | 2004-11-02 |
| 6508014 | Method of drying substrates | Russell H. Arndt, Glenn W. Gale, Kenneth T. Settlemyer, Jr. | 2003-01-21 |