Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7214623 | Planarization system and method using a carbonate containing fluid | Donald J. Delehanty, James Hannah, Fen F. Jamin, Laertis Economikos | 2007-05-08 |
| 7040966 | Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers | Joseph F. Salfelder, Wayne R. Swart, Gopalakrishna B. Prabhu, Srinivas R. Mirmira, Laertis Economikos +3 more | 2006-05-09 |