| 6967375 |
Reduction of chemical mechanical planarization (CMP) scratches with sacrificial dielectric polish stop |
Rainer E. Gehres |
2005-11-22 |
| 6518145 |
Methods to control the threshold voltage of a deep trench corner device |
Johann Alsmeier, Max G. Levy, Victor R. Nastasi, James A. O'Neill, Paul C. Parries |
2003-02-11 |
| 6021360 |
Process controller for balancing usage of tool sets |
Brian C. Barker, John T. Federico, Perry G. Hartswick |
2000-02-01 |
| 5976982 |
Methods for protecting device components from chemical mechanical polish induced defects |
Max G. Levy, Wolfgang Bergner, Bernhard Fiegl, Paul C. Parries, Matthew Sendelbach +3 more |
1999-11-02 |
| 4824797 |
Self-aligned channel stop |
— |
1989-04-25 |
| 4758528 |
Self-aligned metal process for integrated circuit metallization |
Ingrid E. Magdo, Shashi D. Malaviya |
1988-07-19 |
| 4743565 |
Lateral device structures using self-aligned fabrication techniques |
Shashi D. Malaviya |
1988-05-10 |
| 4719185 |
Method of making shallow junction complementary vertical bipolar transistor pair |
— |
1988-01-12 |
| 4717678 |
Method of forming self-aligned P contact |
— |
1988-01-05 |
| 4704368 |
Method of making trench-incorporated monolithic semiconductor capacitor and high density dynamic memory cells including the capacitor |
Shashi D. Malaviya |
1987-11-03 |
| 4691219 |
Self-aligned polysilicon base contact structure |
— |
1987-09-01 |
| 4688073 |
Lateral device structures using self-aligned fabrication techniques |
Shashi D. Malaviya |
1987-08-18 |
| 4665007 |
Planarization process for organic filling of deep trenches |
Nancy R. Cservak, Susan K. Fribley, Mark A. Takacs |
1987-05-12 |
| 4608589 |
Self-aligned metal structure for integrated circuits |
Ingrid E. Magdo, Shashi D. Malaviya |
1986-08-26 |
| 4589193 |
Metal silicide channel stoppers for integrated circuits and method for making the same |
Thomas Hansen, Robert T. Villetto, Jr. |
1986-05-20 |
| 4549927 |
Method of selectively exposing the sidewalls of a trench and its use to the forming of a metal silicide substrate contact for dielectric filled deep trench isolated devices |
Thomas Hansen, James S. Makris |
1985-10-29 |
| 4541168 |
Method for making metal contact studs between first level metal and regions of a semiconductor device compatible with polyimide-filled deep trench isolation schemes |
John R. Galie, Thomas Hansen, Robert T. Villetto, Jr. |
1985-09-17 |
| 4534826 |
Trench etch process for dielectric isolation |
Thomas Hansen, Robert T. Villetto, Jr. |
1985-08-13 |
| 4508579 |
Lateral device structures using self-aligned fabrication techniques |
Shashi D. Malaviya |
1985-04-02 |
| 4400865 |
Self-aligned metal process for integrated circuit metallization |
Ingrid E. Magdo, Shashi D. Malaviya |
1983-08-30 |