Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6037097 | E-beam application to mask making using new improved KRS resist system | James J. Bucchignano, Wu-Song Huang, Kim Y. Lee, Wayne M. Moreau, Karen E. Petrillo | 2000-03-14 |
| 5955222 | Method of making a rim-type phase-shift mask and mask manufactured thereby | Michael S. Hibbs, Steven J. Holmes, Wayne M. Moreau, Niranjan M. Patel | 1999-09-21 |
| 5919597 | Methods for preparing photoresist compositions | Roger F. Sinta, Uday Kumar, George W. Orsula, James I. T. Fahey, William R. Brunsvold +3 more | 1999-07-06 |
| 5733705 | Acid Scavengers for use in chemically amplified photoresists | Nageshwer Rao Bantu, William R. Brunsvold, George J. Hefferon, Wu-Song Huang, Mahmoud M. Khofasteh +2 more | 1998-03-31 |
| 5667938 | Acid scavengers for use in chemically amplified photoresists | Nageshwer Rao Bantu, William R. Brunsvold, George J. Hefferon, Wu-Song Huang, Mahmoud Khojasteh +2 more | 1997-09-16 |
| 5609989 | Acid scavengers for use in chemically amplified photoresists | Nageshwer Rao Bantu, William R. Brunsvold, George J. Hefferon, Wu-Song Huang, Mahmoud Khojasteh +2 more | 1997-03-11 |
| 5296332 | Crosslinkable aqueous developable photoresist compositions and method for use thereof | Harbans S. Sachdev, Willard E. Conley, Premlatha Jagannathan, Ranee W. Kwong, Leo L. Linehan +2 more | 1994-03-22 |