Issued Patents All Time
Showing 51–72 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7205554 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Hiroyasu Shichi +2 more | 2007-04-17 |
| 7205560 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Hiroyasu Shichi +2 more | 2007-04-17 |
| 7200506 | Method for failure analysis and system for failure analysis | Hiroyasu Shichi, Muneyuki Fukuda, Kaoru Umemura | 2007-04-03 |
| 7176458 | Method and apparatus for specimen fabrication | Kaoru Umemura, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi | 2007-02-13 |
| 7138628 | Method and apparatus for specimen fabrication | Kaoru Umemura, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi | 2006-11-21 |
| 7071475 | Method and apparatus for specimen fabrication | Kaoru Umemura, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi | 2006-07-04 |
| 6977376 | Method of prevention charging, and apparatus for charged particle beam using the same | Muneyuki Fukuda, Hiroyasu Shichi | 2005-12-20 |
| 6970004 | Apparatus for inspecting defects of devices and method of inspecting defects | Tohru Ishitani, Hidemi Koike, Aritoshi Sugimoto, Isamu Sekihara, Kaoru Umemura +1 more | 2005-11-29 |
| 6960765 | Probe driving method, and probe apparatus | Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto, Yuichi Hamamura +2 more | 2005-11-01 |
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Hiroyasu Shichi +2 more | 2005-08-09 |
| 6894287 | Microfabrication apparatus and microfabrication method | Muneyuki Fukuda, Hiroyasu Shichi, Osamu Watanabe | 2005-05-17 |
| 6858851 | Apparatus for specimen fabrication and method for specimen fabrication | Muneyuki Fukuda, Hiroyasu Shichi | 2005-02-22 |
| 6828566 | Method and apparatus for specimen fabrication | Kaoru Umemura, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi | 2004-12-07 |
| 6794663 | Method and apparatus for specimen fabrication | Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more | 2004-09-21 |
| 6781125 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Hiroyasu Shichi +2 more | 2004-08-24 |
| 6774363 | Method of preventing charging, and apparatus for charged particle beam using the same | Muneyuki Fukuda, Hiroyasu Shichi | 2004-08-10 |
| 6734687 | Apparatus for detecting defect in device and method of detecting defect | Tohru Ishitani, Hidemi Koike, Aritoshi Sugimoto, Isamu Sekihara, Kaoru Umemura +1 more | 2004-05-11 |
| 6664552 | Method and apparatus for specimen fabrication | Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more | 2003-12-16 |
| 6627889 | Apparatus and method for observing sample using electron beam | Isao Ochiai, Hidemi Koike, Muneyuki Fukuda, Mitsugu Sato, Tohru Ishitani | 2003-09-30 |
| 6583426 | Projection ion beam machining apparatus | Yoshimi Kawanami, Kaoru Umemura, Yuuichi Madokoro | 2003-06-24 |
| 6538254 | Method and apparatus for sample fabrication | Kaoru Umemura, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi | 2003-03-25 |
| 5910871 | Magnetic head having track width specified by grooves formed with projection ion beam | Yoshimi Kawanami, Hisashi Takano, Kaoru Umemura, Yuichi Madokoro | 1999-06-08 |