Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476387 | Method and apparatus for observing or processing and analyzing using a charged beam | Norimasa Nishimura, Akira Shimase, Junzou Azuma, Yuichi Hamamura, Michinobu Mizumura +1 more | 2002-11-05 |
| 6344115 | Pattern forming method using charged particle beam process and charged particle beam processing system | Junzou Azuma, Akira Shimase, Yuichi Hamamura | 2002-02-05 |
| 6303932 | Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam | Yuichi Hamamura, Akira Shimase, Junzou Azuma, Michinobu Mizumura, Norimasa Nishimura +1 more | 2001-10-16 |
| 5976328 | Pattern forming method using charged particle beam process and charged particle beam processing system | Junzou Azuma, Akira Shimase, Yuichi Hamamura | 1999-11-02 |
| 5783830 | Sample evaluation/process observation system and method | Hiroshi Hirose, Shigeto Isakozawa, Yuji Sato, Mikio Ichihashi, Motohide Ukiana | 1998-07-21 |
| 5216253 | Ion implantation apparatus with variable width slits providing an ion beam of high purity | — | 1993-06-01 |
| 5053678 | Microwave ion source | Noriyuki Sakudo, Katsumi Tokiguchi, Takayoshi Seki, Kensuke Amemiya | 1991-10-01 |
| 4801847 | Charged particle accelerator using quadrupole electrodes | Noriyuki Sakudo, Katsumi Tokiguchi, Osami Okada, Norio Saito, Susumu Ozasa | 1989-01-31 |
| 4658143 | Ion source | Katsumi Tokiguchi, Noriyuki Sakudo, Osami Okada, Ken Ninomiya, Susumu Ozasa | 1987-04-14 |
| 4633138 | Ion implanter | Katsumi Tokiguchi, Osami Okada, Noriyuki Sakudo | 1986-12-30 |
| 4629930 | Plasma ion source | Noriyuki Sakudo, Osami Okada, Susumu Ozasa, Katsumi Tokiguchi, Shunroku Taya +2 more | 1986-12-16 |
| 4543465 | Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase | Noriyuki Sakudo, Katsunobu Abe, Katsumi Tokiguchi, Osami Okada | 1985-09-24 |
| 4433228 | Microwave plasma source | Shigeru Nishimatsu, Keizo Suzuki, Noriyuki Sakudo, Ken Ninomiya, Osami Okada +2 more | 1984-02-21 |
| 4409520 | Microwave discharge ion source | Noriyuki Sakudo, Katsumi Tokiguchi, Ichiro Kanomata | 1983-10-11 |
| 4393333 | Microwave plasma ion source | Noriyuki Sakudo, Katsumi Tokiguchi, Ichiro Kanomata, Humihiko Nakashima | 1983-07-12 |
| 4316090 | Microwave plasma ion source | Noriyuki Sakudo, Katsumi Tokiguchi, Ichiro Kanomata | 1982-02-16 |