Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6703850 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Hiroyuki Shinada, Kenji Watanabe, Keiichi Saiki, Hiroshi Morioka +2 more | 2004-03-09 |
| 6661912 | Inspecting method and apparatus for repeated micro-miniature patterns | Junichi Taguchi, Masami Ikota, Yuko Inoue, Tetsuya Watanabe, Wakana Shinke | 2003-12-09 |
| 6583634 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Hiroyuki Shinada, Kenji Watanabe, Keiichi Saiki, Hiroshi Morioka +2 more | 2003-06-24 |
| 6573546 | Semiconductor integrated circuit device and process for manufacturing the same | Kiyonori Ohyu, Makoto Ohkura, Yoshitaka Tadaki, Makoto Ogasawara, Masashi Horiguchi +2 more | 2003-06-03 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |
| 6373054 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2002-04-16 |
| 6365425 | Method of manufacturing semiconductor device | Masami Ikota, Hisato Nakamura | 2002-04-02 |
| 6347150 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada +2 more | 2002-02-12 |
| 6329826 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-12-11 |
| 6291847 | Semiconductor integrated circuit device and process for manufacturing the same | Kiyonori Ohyu, Makoto Ohkura, Yoshitaka Tadaki, Makoto Ogasawara, Masashi Horiguchi +2 more | 2001-09-18 |
| 6236057 | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2001-05-22 |
| 6172365 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2001-01-09 |
| 6172363 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-01-09 |
| 6087673 | Method of inspecting pattern and apparatus thereof | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2000-07-11 |
| 5986263 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 1999-11-16 |
| 5877498 | Method and apparatus for X-ray analyses | Yoshimi Sudo, Tokuo Kure, Ken Ninomiya, Katsuhiro Kuroda, Takashi Nishida +3 more | 1999-03-02 |