Issued Patents All Time
Showing 51–75 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7916929 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2011-03-29 |
| 7859656 | Defect inspection method and system | Sachio Uto, Hiroyuki Nakano, Akira Hamamatsu, Yuta Urano | 2010-12-28 |
| 7826047 | Apparatus and method for optical inspection | Shunji Maeda | 2010-11-02 |
| 7714997 | Apparatus for inspecting defects | Shunji Maeda | 2010-05-11 |
| 7599545 | Method and its apparatus for inspecting defects | Shunji Maeda, Hitoshi Kubota | 2009-10-06 |
| 7567343 | Method and apparatus for detecting defects on a wafer | Yoshimasa Ohshima, Sachio Uto | 2009-07-28 |
| 7512259 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2009-03-31 |
| 7508973 | Method of inspecting defects | Takafumi Okabe, Shunji Maeda, Hidetoshi Nishiyama | 2009-03-24 |
| 7499162 | Method and apparatus for observing and inspecting defects | Shunji Maeda, Kazuo Yamaguchi, Minoru Yoshida, Atsushi Yoshida, Kenji Oka +1 more | 2009-03-03 |
| 7492452 | Defect inspection method and system | Sachio Uto, Hiroyuki Nakano, Akira Hamamatsu, Yuta Urano | 2009-02-17 |
| 7463350 | Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal | Hidetoshi Nishiyama, Minoru Yoshida, Shunji Maeda | 2008-12-09 |
| 7440092 | Method and apparatus for detecting defects | Shunji Maeda | 2008-10-21 |
| 7400393 | Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen | Shunji Maeda, Hidetoshi Nishiyama | 2008-07-15 |
| 7372561 | Method and apparatus for inspecting defects and a system for inspecting defects | Shunji Maeda, Takafumi Okabe, Yoichi Takahara | 2008-05-13 |
| 7359044 | Method and apparatus for inspecting pattern defects | Hidetoshi Nishiyama, Shunji Maeda, Minoru Yoshida | 2008-04-15 |
| 7299147 | Systems for managing production information | Shunji Maeda | 2007-11-20 |
| 7274813 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2007-09-25 |
| 7271892 | Method and apparatus for inspecting defects | Shunji Maeda, Masahiro Watanabe | 2007-09-18 |
| 7251024 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Minoru Yoshida, Sachio Uto, Hiroaki Shishido +1 more | 2007-07-31 |
| 7173693 | Method for inspecting defects and an apparatus of the same | Shunji Maeda, Yukio Kembo | 2007-02-06 |
| 7161671 | Method and apparatus for inspecting defects | Shunji Maeda | 2007-01-09 |
| 7142294 | Method and apparatus for detecting defects | Shunji Maeda | 2006-11-28 |
| 7092095 | Method and apparatus for observing and inspecting defects | Shunji Maeda, Kazuo Yamaguchi, Minoru Yoshida, Atsushi Yoshida, Kenji Oka +1 more | 2006-08-15 |
| 6947587 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2005-09-20 |
| 6874466 | Intake valve device | Toru Sakurai | 2005-04-05 |