Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6895179 | Wafer stage for wafer processing apparatus | Seiichiro Kanno, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Koji Okuda | 2005-05-17 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2005-01-25 |
| 6835665 | Etching method of hardly-etched material and semiconductor fabricating method and apparatus using the method | Nobuyuki Mise, Ken Yoshioka, Tatehito Usui | 2004-12-28 |
| 6833051 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2004-12-21 |
| 6825617 | Semiconductor processing apparatus | Seiichiro Kanno, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Hideyuki Yamamoto | 2004-11-30 |
| 6771481 | Plasma processing apparatus for processing semiconductor wafer using plasma | Seiichiro Kanno, Hideyuki Yamamoto, Akira Kagoshima | 2004-08-03 |
| 6759253 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Tetsuo Ono, Kazue Takahashi, Nobuyuki Mise | 2004-07-06 |
| 6747239 | Plasma processing apparatus and method | Junichi Tanaka, Hiroyuki Kitsunai, Seiichiro Kanno, Hideyuki Yamamoto | 2004-06-08 |
| 6716301 | Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe | Seiichiro Kanno, Tsutomu Tetsuka, Junichi Tanaka, Hideyuki Yamamoto, Kazuyuki Ikenaga +1 more | 2004-04-06 |
| 6646233 | Wafer stage for wafer processing apparatus and wafer processing method | Seiichiro Kanno, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Koji Okuda | 2003-11-11 |
| 6590179 | Plasma processing apparatus and method | Junichi Tanaka, Hiroyuki Kitsunai, Seiichiro Kanno, Hideyuki Yamamoto | 2003-07-08 |
| 6499424 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2002-12-31 |
| 6481370 | Plasma processsing apparatus | Hideyuki Kazumi, Tsutomu Tetsuka, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2002-11-19 |
| 6245202 | Plasma treatment device | Manabu Edamura, Ken Yoshioka, Saburo Kanai | 2001-06-12 |
| 6180019 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2001-01-30 |
| 6172321 | Method and apparatus for plasma processing apparatus | Ken Yoshioka, Saburou Kanai, Tetsunori Kaji, Manabu Edamura | 2001-01-09 |
| 6034346 | Method and apparatus for plasma processing apparatus | Ken Yoshioka, Saburou Kanai, Tetsunori Kaji, Manabu Edamura | 2000-03-07 |