Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe +5 more | 2003-06-24 |
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Yusuke Yajima, Hiroyuki Shinada, Mari Nozoe, Atsuko Takafuji, Kaoru Umemura +2 more | 2002-11-05 |
| 5744800 | Defect observing electron microscope | Hiroshi Kakibayashi, Hidekazu Okuhira, Takashi Irie, Jiro Tokita, Keiichi Kanehori +1 more | 1998-04-28 |
| 5373158 | Field-emission transmission electron microscope and operation method thereof | Mikio Ichihashi | 1994-12-13 |
| 5134289 | Field emission electron device which produces a constant beam current | Mikio Ichihashi, Shigeto Isakozawa, Yuji Sato | 1992-07-28 |
| 4767926 | Electron beam metrology system | Mikio Ichihashi, Kenichi Yamamoto | 1988-08-30 |
| 4751384 | Electron beam metrology system | Mikio Ichihashi, Hideo Todokoro | 1988-06-14 |
| 4605860 | Apparatus for focusing a charged particle beam onto a specimen | Satoru Fukuhara, Mikio Ichihashi, Shigemitsu Seitoh | 1986-08-12 |
| 4600839 | Small-dimension measurement system by scanning electron beam | Mikio Ichihashi, Satoru Fukuhara, Masahide Okumura | 1986-07-15 |