Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437606 | Method of making a three-dimensional memory array with etch stop | Raghuveer S. Makala, Johann Alsmeier, Yao-Sheng Lee, Masanori Terahara, Jayavel Pachamuthu | 2016-09-06 |
| 9123728 | Semiconductor device and method for manufacturing semiconductor device | Takahiro Kono, Shinichi Akiyama, Tamotsu Owada | 2015-09-01 |
| 9099496 | Method of forming an active area with floating gate negative offset profile in FG NAND memory | Ming Tian, Jayavel Pachamuthu, Atsushi Suyama, James Kai, Raghuveer S. Makala +4 more | 2015-08-04 |
| 9093480 | Spacer passivation for high aspect ratio etching of multilayer stacks for three dimensional NAND device | Raghuveer S. Makala, Yao-Sheng Lee, Johann Alsmeier, Henry Chien, Masanori Terahara | 2015-07-28 |
| 8669177 | Semiconductor device and method for manufacturing semiconductor device | Takahiro Kouno, Shinichi Akiyama, Tamotsu Owada | 2014-03-11 |
| 8604552 | Semiconductor device and method for fabricating semiconductor device | Tamotsu Owada | 2013-12-10 |
| 8536708 | Method of manufacturing a semiconductor device and semiconductor device | Shinichi Akiyama, Kazuo Kawamura, Hisaya Sakai, Kazuya Okubo | 2013-09-17 |
| 8349722 | Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device | Tamotsu Owada, Shun-ichi Fukuyama, Kengo Inoue, Atsuo Shimizu | 2013-01-08 |
| 8338953 | Method of manufacturing a semiconductor device and semiconductor device | Shinichi Akiyama, Kazuo Kawamura, Hisaya Sakai, Kazuya Okubo | 2012-12-25 |
| 8105935 | Method of manufacturing a semiconductor device | Naoki Ohara, Tamotsu Owada, Kenichi Yanai | 2012-01-31 |
| 8030207 | Method of manufacturing a semiconductor device and semiconductor device | Shinichi Akiyama, Kazuo Kawamura, Hisaya Sakai, Kazuya Okubo | 2011-10-04 |
| 7951686 | Method of manufacturing semiconductor device having device characteristics improved by straining surface of active region | Sadahiro Kishii, Masanori Terahara, Ryo Tanabe, Kaina Suzuki, Shigeo Satoh | 2011-05-31 |
| 7749897 | Method of manufacturing semiconductor device | Ken Sugimoto, Yoshiyuki Ohkura, Tamotsu Owada, Shunn-ichi Fukuyama | 2010-07-06 |
| 7701016 | Semiconductor device having device characteristics improved by straining surface of active region and its manufacture method | Sadahiro Kishii, Masanori Terahara, Ryo Tanabe, Kaina Suzuki, Shigeo Satoh | 2010-04-20 |
| 7642185 | Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device | Tamotsu Owada, Ken Sugimoto, Shun-ichi Fukuyama | 2010-01-05 |
| 7541296 | Method for forming insulating film, method for forming multilayer structure and method for manufacturing semiconductor device | Tamotsu Owada, Yoshihiro Nakata, Shirou Ozaki, Shun-ichi Fukuyama | 2009-06-02 |
| 7485570 | Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device | Tamotsu Owada, Shun-ichi Fukuyama, Kengo Inoue, Atsuo Shimizu | 2009-02-03 |
| 7208405 | Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device | Tamotsu Owada, Ken Sugimoto, Shun-ichi Fukuyama | 2007-04-24 |
| 7001847 | Micro pattern forming method and semiconductor device manufacturing method | — | 2006-02-21 |
| 6949830 | Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device | Tamotsu Owada, Shun-ichi Fukuyama, Kengo Inoue, Atsuo Shimizu | 2005-09-27 |
| 6852587 | Method for fabricating a semiconductor device | — | 2005-02-08 |
| 6707156 | Semiconductor device with multilevel wiring layers | Takashi Suzuki, Satoshi Otsuka, Tsutomu Hosoda, Shun-ichi Fukuyama | 2004-03-16 |
| 6632739 | Method for fabricating a semiconductor device | — | 2003-10-14 |
| 6605510 | Semiconductor device with both memories and logic circuits and its manufacture | — | 2003-08-12 |
| 6602748 | Method for fabricating a semiconductor device | — | 2003-08-05 |