Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514878 | Method of fabricating a semiconductor device having a multilayered interconnection structure | — | 2003-02-04 |
| 6483150 | Semiconductor device with both memories and logic circuits and its manufacture | — | 2002-11-19 |
| 6337519 | Semiconductor device having a multilayered interconnection structure | — | 2002-01-08 |
| 6153511 | Semiconductor device having a multilayered interconnection structure | — | 2000-11-28 |
| 5905298 | Semiconductor device having an insulation film of low permittivity and a fabrication process thereof | — | 1999-05-18 |
| 5620526 | In-situ cleaning of plasma treatment chamber | Masahiko Doki, Shoji Okuda, Junya Nakahira, Hideaki Kikuchi | 1997-04-15 |