Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620526 | In-situ cleaning of plasma treatment chamber | Hirofumi Watatani, Masahiko Doki, Shoji Okuda, Hideaki Kikuchi | 1997-04-15 |
| 5231057 | Method of depositing insulating layer on underlying layer using plasma-assisted CVD process using pulse-modulated plasma | Masahiko Doki, Yuji Furumura | 1993-07-27 |