Issued Patents All Time
Showing 76–100 of 209 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9631777 | Raw material vaporizing and supplying apparatus equipped with raw material concentration | Masaaki Nagase, Kaoru Hirata, Atushi Hidaka, Kouji Nishino, Takeshi Nakamura | 2017-04-25 |
| 9574917 | Pressure type flow rate control device | Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Kouji Nishino | 2017-02-21 |
| 9556518 | Raw material gas supply apparatus for semiconductor manufacturing equipment | Masaaki Nagase, Atsushi Hidaka, Kaoru Hirata, Ryousuke Dohi, Kouji Nishino | 2017-01-31 |
| 9507352 | Variable orifice type pressure-controlled flow controller | Ryousuke Dohi, Kouji Nishino, Yohei Sawada | 2016-11-29 |
| 9494947 | Pressure type flow control system with flow monitoring | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Katsuyuki Sugita | 2016-11-15 |
| 9477232 | Apparatus for dividing and supplying gas and method for dividing and supplying gas | Eiji Takahashi, Norikazu Sasaki, Atsushi Sawachi, Yohei Sawada, Ryousuke Dohi +1 more | 2016-10-25 |
| 9383758 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2016-07-05 |
| 9261884 | Apparatus for dividing and supplying gas and method for dividing and supplying gas by use of this apparatus | Yohei Sawada, Ryousuke Dohi, Kouji Nishino | 2016-02-16 |
| 9233347 | Mixed gas supply device | Masaaki Nagase, Ryousuke Dohi, Kouji Nishino | 2016-01-12 |
| 9200725 | Opening degree detection device for manual valve | Ryousuke Dohi, Atsuo Tomita, Kouji Nishino, Hideyuki Miyagawa | 2015-12-01 |
| 9169558 | Fluid control apparatus | Jun Hirose, Kazuyuki Tezuka, Yohei Uchida, Mutsunori Koyomogi, Takahiro Matsuda +2 more | 2015-10-27 |
| 9163969 | Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply device | Yohei Sawada, Masaaki Nagase, Kouji Nishino, Ryousuke Dohi | 2015-10-20 |
| 9163743 | Piezoelectrically driven valve and piezoelectrically driven flow rate control device | Atsushi Hidaka, Kaoru Hirata, Masaaki Nagase, Ryousuke Dohi, Kouji Nishino | 2015-10-20 |
| 9133951 | Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed | Tadahiro Ohmi, Kouji Nishino, Ryousuke Dohi, Masaaki Nagase, Kaoru Hirata +6 more | 2015-09-15 |
| 9098082 | Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller | Kazuhiko Sugiyama, Kouji Nishino, Ryousuke Dohi, Toyomi Uenoyama | 2015-08-04 |
| 9038663 | Opening degree detection device for automatically operated valve | Ryousuke Dohi, Atsuo Tomita, Kouji Nishino, Yohei Sawada | 2015-05-26 |
| 9010369 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2015-04-21 |
| 8931506 | Gas supply apparatus equipped with vaporizer | Atsushi Nagata, Masaaki Nagase, Atsushi Hidaka, Kaoru Hirata, Atsushi Matsumoto +2 more | 2015-01-13 |
| 8833730 | Cam control valve | Yohei Sawada, Ryousuke Dohi, Kouji Nishino | 2014-09-16 |
| 8757197 | Automatic pressure regulator for flow rate regulator | Kaoru Hirata, Katsuyuki Sugita, Kouji Nishino, Ryousuke Dohi | 2014-06-24 |
| 8724974 | Vaporizer | Tadahiro Ohmi, Yasuyuki Shirai, Masaaki Nagase, Satoru Yamashita, Atsushi Hidaka +3 more | 2014-05-13 |
| 8714188 | Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used | Tadahiro Ohmi, Kouji Nishino, Masaaki Nagase, Ryousuke Dohi, Ryutaro Nishimura | 2014-05-06 |
| 8662471 | Solenoid valve | Tadahiro Ohmi, Kouji Nishino, Tsuyoshi Tanigawa, Michio Yamaji, Ryousuke Dohi | 2014-03-04 |
| 8601976 | Gas supply system for semiconductor manufacturing facilities | Kouji Nishino, Ryousuke Dohi, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita | 2013-12-10 |
| 8606412 | Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus | Masaaki Nagase, Ryousuke Dohi, Kouji Nishino, Kaoru Hirata, Katsuyuki Sugita +1 more | 2013-12-10 |