Issued Patents All Time
Showing 26–50 of 209 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11326921 | Flow rate measuring method and flow rate measuring device | Masaaki Nagase, Yohei Sawada, Kouji Nishino | 2022-05-10 |
| 11313756 | Flow rate control device and abnormality detection method using flow rate control device | Masaaki Nagase, Kaoru Hirata, Yohei Sawada, Kouji Nishino | 2022-04-26 |
| 11269362 | Flow rate control method and flow rate control device | Kaoru Hirata, Shinya Ogawa, Katsuyuki Sugita, Kouji Nishino | 2022-03-08 |
| 11226257 | Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller | Akihiro Harada, Kouji Nishino, Ryousuke Dohi, Koji Kawada, Katsuyuki Sugita +4 more | 2022-01-18 |
| 11226641 | Fluid control device | Kaoru Hirata, Katsuyuki Sugita, Takahiro Imai, Shinya Ogawa, Kouji Nishino | 2022-01-18 |
| 11216016 | Flow rate control method and flow rate control device | Kaoru Hirata, Shinya Ogawa, Katsuyuki Sugita, Kouji Nishino | 2022-01-04 |
| 11079774 | Flow rate control device | Katsuyuki Sugita, Ryousuke Dohi, Kaoru Hirata, Koji Kawada, Kouji Nishino | 2021-08-03 |
| 11054052 | Piezoelectric-element-driven valve and flow rate control device | Ryousuke Dohi, Kaoru Hirata, Katsuyuki Sugita, Koji Kawada, Kouji Nishino | 2021-07-06 |
| 10976240 | Concentration measurement device | Yoshihiro Deguchi, Masaaki Nagase, Michio Yamaji, Kouji Nishino, Masayoshi Kawashima +1 more | 2021-04-13 |
| 10969259 | Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device | Yohei Sawada, Masaaki Nagase, Kouji Nishino | 2021-04-06 |
| 10928813 | Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition | Masaaki Nagase, Kaoru Hirata, Yohei Sawada, Katsuyuki Sugita, Kouji Nishino | 2021-02-23 |
| 10928303 | Concentration measuring device | Yoshihiro Deguchi, Takashi Fukawa, Taiki Hattori, Masaaki Nagase, Kazuteru Tanaka +1 more | 2021-02-23 |
| 10895484 | Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method | Yohei Sawada, Kouji Nishino, Masaaki Nagase | 2021-01-19 |
| 10884435 | Pressure type flow rate control device, and flow rate calculating method and flow rate control method for same | Masaaki Nagase, Kaoru Hirata, Kouji Nishino | 2021-01-05 |
| 10883866 | Pressure-based flow rate control device and malfunction detection method therefor | Katsuyuki Sugita, Kouji Nishino, Kaoru Hirata, Masahiko TAKIMOTO | 2021-01-05 |
| 10884436 | Flow rate signal correction method and flow rate control device employing same | Katsuyuki Sugita, Kouji Nishino, Kaoru Hirata, Masahiko TAKIMOTO, Masayoshi Kawashima +1 more | 2021-01-05 |
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Risako Miyoshi, Norihiko Amikura, Kazuyuki Miura, Masaaki Nagase, Satoru Yamashita +2 more | 2020-12-29 |
| 10838435 | Pressure-type flow rate control device | Kaoru Hirata, Katsuyuki Sugita, Kouji Nishino | 2020-11-17 |
| 10648572 | Valve with built-in orifice, and pressure-type flow rate control device | Yohei Sawada, Kaoru Hirata, Masaaki Nagase, Kouji Nishino | 2020-05-12 |
| 10646844 | Vaporization supply apparatus | Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Takatoshi NAKATANI +3 more | 2020-05-12 |
| 10641407 | Flow rate control device | Toru Hirai, Kazuyuki Morisaki, Kaoru Hirata, Kouji Nishino | 2020-05-05 |
| 10604840 | Liquid level indicator and liquid raw material vaporization feeder | Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Satoru Yamashita, Keiji Hirao +1 more | 2020-03-31 |
| 10534376 | Gas divided flow supplying apparatus for semiconductor manufacturing equipment | Kouji Nishino, Ryousuke Dohi, Kaoru Hirata, Katsuyuki Sugita | 2020-01-14 |
| 10408742 | Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method | Masaaki Nagase, Kouji Nishino, Michio Yamaji, Shigetoshi Sugawa, Rihito Kuroda | 2019-09-10 |
| 10386861 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Katsuyuki Sugita | 2019-08-20 |