Issued Patents All Time
Showing 126–150 of 209 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7669455 | Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device | Tadahiro Ohmi, Kazuhiko Sugiyama, Shoichi Hino, Eiji Takahashi, Makoto Saegusa +4 more | 2010-03-02 |
| 7654137 | Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed | Kaoru Hirata, Kouji Nishino, Ryousuke Dohi | 2010-02-02 |
| 7594517 | Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed | Hiroshi Kannan, Tomio Uno, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura +1 more | 2009-09-29 |
| 7595087 | Process of forming platinum coating catalyst layer in moisture-generating reactor | Tadahiro Ohmi, Akihiro Morimoto, Masafumi Kitano, Yukio Minami, Koji Kawada | 2009-09-29 |
| 7553459 | Apparatus and reactor for generating and feeding high purity moisture | Tadahiro Ohmi, Yukio Minami, Kouji Kawada, Katunori Komehana, Teruo Honiden +6 more | 2009-06-30 |
| 7497482 | Pipe joint | Kazuhiko Sugiyama, Keiko Hada, Eiji Ideta, Naofumi Yasumoto, Michio Yamaji | 2009-03-03 |
| 7472887 | Valve for vacuum exhaustion system | Tadahiro Ohmi, Michio Yamaji, Masafumi Kitano, Akihiro Morimoto | 2009-01-06 |
| 7416165 | Diaphragm valve for the vacuum exhaustion system | Tadahiro Ohmi, Michio Yamaji, Masafumi Kitano, Akihiro Morimoto | 2008-08-26 |
| 7367241 | Differential pressure type flowmeter and differential pressure type flow controller | Tadahiro Ohmi, Kazuhiko Sugiyama, Tomio Uno, Kouji Nishino, Osamu Nakamura +2 more | 2008-05-06 |
| 7368092 | Apparatus and reactor for generating and feeding high purity moisture | Tadahiro Ohmi, Yukio Minami, Kouji Kawada, Katunori Komehana, Teruo Honiden +6 more | 2008-05-06 |
| 7363810 | Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same | Kaoru Hirata, Kouji Nishino, Ryousuke Dohi | 2008-04-29 |
| 7278437 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Tadahiro Ohmi, Kouji Nishino, Masaaki Nagase, Ryousuke Dohi, Ryutaro Nishimura | 2007-10-09 |
| 7258845 | Apparatus and reactor for generating and feeding high purity moisture | Tadahiro Ohmi, Yukio Minami, Kouji Kawada, Katunori Komehana, Teruo Honiden +6 more | 2007-08-21 |
| 7219533 | Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method | Tadahiro Ohmi, Masaaki Nagase, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura +1 more | 2007-05-22 |
| 7150444 | Valve with an integral orifice | Tadahiro Ohmi, Kouji Nishino, Michio Yamaji, Ryousuke Dohi, Eiji Ideta +1 more | 2006-12-19 |
| 7103990 | Rotary silicon wafer cleaning apparatus | Tadahiro Ohmi, Yasuyuki Shirai, Takumi Fujita, Yukio Minami, Akihiro Morimoto +1 more | 2006-09-12 |
| 7085628 | Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus | Tadahiro Ohmi, Tomio Uno, Osamu Nakamura, Ryousuke Dohi, Kouji Nishino +2 more | 2006-08-01 |
| 7080658 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Tadahiro Ohmi, Kouji Nishino, Masaaki Nagase, Kyousuke Dohi, Ryutaro Nishimura | 2006-07-25 |
| 7059363 | Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system | Kazuhiko Sugiyama, Kouji Nishino, Ryosuke Dohi, Toyomi Uenoyama | 2006-06-13 |
| 7008598 | Reactor for generating moisture | Tadahiro Ohmi, Kouji Kawada, Akihiro Morimoto, Yukio Minami, Kenji Tubota +4 more | 2006-03-07 |
| 6964279 | Pressure-type flow rate control apparatus | Tadahiro Ohmi, Tomio Uno, Osamu Nakamura, Ryousuke Dohi, Kouji Nishino +5 more | 2005-11-15 |
| 6919056 | Reactor for generating moisture | Tadahiro Ohmi, Kouji Kawada, Akihiro Morimoto, Yukio Minami, Kenji Tubota +4 more | 2005-07-19 |
| 6871803 | Valve with an integral orifice | Tadahiro Ohmi, Kouji Nishino, Michio Yamaji, Ryousuke Dohi, Eiji Ideta +1 more | 2005-03-29 |
| 6848470 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2005-02-01 |
| 6820632 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2004-11-23 |