Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5433789 | Methods and apparatus for generating plasma, and semiconductor processing methods using mode restricted microwaves | Yoshinao Kawasaki, Keizo Suzuki, Kazuo Nojiri, Hiromichi Enami, Tetsunori Kaji +2 more | 1995-07-18 |
| 5380397 | Method of treating samples | Ryooji Fukuyama, Makoto Nawata, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more | 1995-01-10 |
| 5276386 | Microwave plasma generating method and apparatus | Seiichi Watanabe, Makoto Nawata, Ryooji Fukuyama, Saburo Kanai, Yoshinao Kawasaki | 1994-01-04 |
| 4971651 | Microwave plasma processing method and apparatus | Seiichi Watanabe, Makoto Nawata, Ryooji Fukuyama, Saburo Kanai, Keiji Ueyama | 1990-11-20 |
| 4943361 | Plasma treating method and apparatus therefor | Yutaka Omoto, Takeshi Harada | 1990-07-24 |
| 4824309 | Vacuum processing unit and apparatus | Norio Nakazato, Yoshimasa Fukushima, Fumio Shibata, Tsunehiko Tsubone, Norio Kanai | 1989-04-25 |
| 4795529 | Plasma treating method and apparatus therefor | Yoshinao Kawasaki, Hironobu Kawahara, Kado Hirobe, Katsuyoshi Kudo | 1989-01-03 |
| 4718681 | Sample chucking apparatus | Ryokichi Kaji, Hideki Izumi, Toshiaki Makino, Kazuaki Ichihashi, Sosuke Kawashima | 1988-01-12 |
| 4664578 | Semiconductor substrate transport system | — | 1987-05-12 |
| 4631106 | Plasma processor | Norio Nakazato, Takeshi Harada, Ryoji Fukuyama, Makoto Nawata, Hironobu Ueda +3 more | 1986-12-23 |
| 4565601 | Method and apparatus for controlling sample temperature | Norio Nakazato, Yoshimasa Fukushima, Kousai Hiratsuka, Fumio Shibata, Noriaki Yamamoto +1 more | 1986-01-21 |
| 4440093 | Vehicle tilt control apparatus | Katsuyuki Terada, Kenjiro Kasai, Fumio Iwasaki | 1984-04-03 |
| 4402527 | Vehicle body vibration control apparatus | Kenjirou Kasai, Katsuyuki Terada, Tadashi Beppu | 1983-09-06 |
| 4382413 | Earthquake resistant crane | Katsuyuki Terada, Kenjiro Kasai, Keiichiro Torii, Toru Saito | 1983-05-10 |