Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421321 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Raija H. Matero, Hidemi Suemori +2 more | 2022-08-23 |
| 11396701 | Passivation against vapor deposition | Varun Sharma | 2022-07-26 |
| 11387107 | Deposition of organic films | Hidemi Suemori, Viljami Pore, Suvi Haukka, Varun Sharma | 2022-07-12 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2022-01-04 |
| 11170993 | Selective PEALD of oxide on dielectric | Viljami Pore, Suvi Haukka, Toshiya Suzuki, Lingyun Jia, Sun Ja Kim +1 more | 2021-11-09 |
| 11145506 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Ivo Raaijmakers +3 more | 2021-10-12 |
| 11094535 | Selective passivation and selective deposition | Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie, Hidemi Suemori +5 more | 2021-08-17 |
| 11081342 | Selective deposition using hydrophobic precursors | Elina Färm, Hidemi Suemori, Raija H. Matero, Antti Niskanen, Suvi Haukka | 2021-08-03 |
| 11047040 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2021-06-29 |
| 10991573 | Uniform deposition of SiOC on dielectric and metal surfaces | Lingyun Jia, Viljami Pore, Sun Ja Kim | 2021-04-27 |
| 10964534 | Enhanced thin film deposition | Antti Rahtu, Kai-Erik Elers, Wei Li | 2021-03-30 |
| 10923361 | Deposition of organic films | Hidemi Suemori, Viljami Pore, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2021-02-16 |
| 10900120 | Passivation against vapor deposition | Varun Sharma | 2021-01-26 |
| 10872765 | Selective layer formation using deposition and removing | Viljami Pore | 2020-12-22 |
| 10854460 | Deposition of organic films | Hidemi Suemori, Viljami Pore, Suvi Haukka, Varun Sharma | 2020-12-01 |
| 10612137 | Organic reactants for atomic layer deposition | Antti Niskanen, Hidemi Suemori, Suvi Haukka | 2020-04-07 |
| 10553440 | Methods for depositing nickel films and for making nickel silicide and nickel germanide | Viljami Pore, Suvi Haukka, Tom E. Blomberg | 2020-02-04 |
| 10513772 | Process for passivating dielectric films | Tom E. Blomberg, Robert Huggare, Jan Willem Maes, Vladimir Machkaoutsan, Dieter Pierreux | 2019-12-24 |
| 10456808 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2019-10-29 |
| 10453701 | Deposition of organic films | Hidemi Suemori, Viljami Pore, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2019-10-22 |
| 10443123 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2019-10-15 |
| 10373820 | Deposition of organic films | Hidemi Suemori, Viljami Pore, Suvi Haukka, Varun Sharma | 2019-08-06 |
| 10297444 | Enhanced thin film deposition | Antti Rahtu, Kai-Erik Elers, Wei Li | 2019-05-21 |
| 10204790 | Methods for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Raija H. Matero, Hidemi Suemori +2 more | 2019-02-12 |
| 10047435 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2018-08-14 |