Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10043880 | Metal silicide, metal germanide, methods for making the same | Viljami Pore, Suvi Haukka, Tom E. Blomberg | 2018-08-07 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2018-02-20 |
| 9831094 | Enhanced thin film deposition | Antti Rahtu, Kai-Erik Elers, Wei Li | 2017-11-28 |
| 9816180 | Selective deposition | Suvi Haukka | 2017-11-14 |
| 9634106 | Doped metal germanide and methods for making the same | Viljami Pore, Suvi Haukka, Tom E. Blomberg | 2017-04-25 |
| 9514956 | Method of growing oxide thin films | Suvi Haukka, Marko Tuominen | 2016-12-06 |
| 9379011 | Methods for depositing nickel films and for making nickel silicide and nickel germanide | Viljami Pore, Suvi Haukka, Tom E. Blomberg | 2016-06-28 |
| 9127351 | Enhanced thin film deposition | Antti Rahtu, Kai-Erik Elers, Wei Li | 2015-09-08 |
| 9129897 | Metal silicide, metal germanide, methods for making the same | Viljami Pore, Suvi Haukka, Tom E. Blomberg | 2015-09-08 |
| 8993055 | Enhanced thin film deposition | Antti Rahtu, Kai-Erik Elers, Wei Li | 2015-03-31 |
| 8871617 | Deposition and reduction of mixed metal oxide thin films | Viljami Pore | 2014-10-28 |
| 7824492 | Method of growing oxide thin films | Suvi Haukka, Marko Tuominen | 2010-11-02 |
| 7771534 | Method of growing oxide thin films | Suvi Haukka, Marko Tuominen | 2010-08-10 |
| 7771533 | Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide | Suvi Haukka, Marko Tuominen | 2010-08-10 |