Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9127351 | Enhanced thin film deposition | Antti Rahtu, Eva Tois, Kai-Erik Elers | 2015-09-08 |
| 9095869 | Atomic layer deposition with plasma source | Vaino Kilpi, Timo Malinen, Juhana Kostamo, Sven Lindfors | 2015-08-04 |
| 8993055 | Enhanced thin film deposition | Antti Rahtu, Eva Tois, Kai-Erik Elers | 2015-03-31 |
| 8681283 | Method and resulting capacitor structure for liquid crystal on silicon display devices | Herb He Huang | 2014-03-25 |
| 8502224 | Measuring apparatus that includes a chip having a through silicon via, a heater, and a stress sensor | Ra-Min Tain, John Hon-Shing Lau, Ming-Che Hsieh, Ming-Ji Dai | 2013-08-06 |
| 8339553 | Method and structure for top metal formation of liquid crystal on silicon devices | Herb He Huang, Fish Ren, Nancy Han | 2012-12-25 |
| 8320628 | Method and system for assisting driver | Kuo-Hsiang Cheng, Long-Tai Chen, Dau-Chen Huang | 2012-11-27 |
| 8102058 | Chip package structure and method for fabricating the same | Ming-Che Hsieh, Ra-Min Tain | 2012-01-24 |
| 8004079 | Chip package structure and manufacturing method thereof | Ra-Min Tain, Yu-Lin Chao, Shu-Jung Yang, Rong-Chang Fang, Chih-Yuan Cheng +1 more | 2011-08-23 |
| 7981791 | Thin films | Suvi Haukka, Ivo Raaijmakers, Juhana Kostamo, Hessel Sprey, Christiaan J. Werkhoven | 2011-07-19 |
| 7936406 | Method and resulting capacitor structure for liquid crystal on silicon display devices | Herb He Huang, Haiting Li, Ziru Ren, Yinan Han | 2011-05-03 |
| 7920070 | Parking guidance device and method thereof | Long-Tai Chen, Yen-Shu Chang, Kuo-Hsiang Cheng | 2011-04-05 |
| 7778774 | Portable telematics device | Long-Tai Chen, Li-Kung Huang | 2010-08-17 |
| RE41189 | Method of making enhanced CVD diamond | Russell J. Hemley, Ho-Kwang Mao, Chih-shiue Yan | 2010-04-06 |
| 7638170 | Low resistivity metal carbonitride thin film deposition by atomic layer deposition | — | 2009-12-29 |
| 7419903 | Thin films | Suvi Haukka, Ivo Raaijmakers, Juhana Kostamo, Hessel Sprey | 2008-09-02 |
| 7410666 | Metal nitride carbide deposition by ALD | Kai-Erik Elers | 2008-08-12 |
| 6986914 | Metal nitride deposition by ALD with reduction pulse | Kai-Erik Elers | 2006-01-17 |
| 6955986 | Atomic layer deposition methods for forming a multi-layer adhesion-barrier layer for integrated circuits | — | 2005-10-18 |
| 6820570 | Atomic layer deposition reactor | Olli Kilpela, Ville Antero Saanila, Kai-Erik Elers, Juhana Kostamo, Ivo Raaijmakers +1 more | 2004-11-23 |
| 6811610 | Method of making enhanced CVD diamond | Robert H. Frushour | 2004-11-02 |