Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790153 | Methods and apparatus for electron beam etching process | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Gonzalo Monroy +1 more | 2020-09-29 |
| 10707086 | Etching methods | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Gonzalo Monroy +1 more | 2020-07-07 |
| 10615004 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Olga Regelman | 2020-04-07 |
| 10546731 | Method, apparatus and system for wafer dechucking using dynamic voltage sweeping | Haitao Wang, Michael G. Chafin, Kartik Ramaswamy, Valentin N. Todorow, Kenny L. Doan +3 more | 2020-01-28 |
| 10544505 | Deposition or treatment of diamond-like carbon in a plasma reactor | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Gonzalo Monroy +1 more | 2020-01-28 |
| 10510515 | Processing tool with electrically switched electrode assembly | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Kallol Bera, James D. Carducci +1 more | 2019-12-17 |
| 10418225 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Olga Regelman | 2019-09-17 |
| 10373807 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Olga Regelman | 2019-08-06 |
| 10312056 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Olga Regelman | 2019-06-04 |
| 8865543 | Ge-based NMOS device and method for fabricating the same | Ru Huang, Zhiqiang Li, Xia An, Xing Zhang | 2014-10-21 |
| 8541847 | Semiconductor device and method for fabricating the same | Xia An, Quanxin Yun, Ru Huang, Xing Zhang | 2013-09-24 |