Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Bok Hoen Kim, Nam Le, Martin Jay Seamons, Ameeta Madhava, Michael P. Nault +2 more | 2005-01-18 |
| 6366346 | Method and apparatus for optical detection of effluent composition | Sebastien Raoux, Dave Silvetti, Stefan Wolff, Russ Newman, Imad Yousif +1 more | 2002-04-02 |
| 6329297 | Dilute remote plasma clean | Kenneth E. Balish, Tsutomu Tanaka, Mark J. Beals | 2001-12-11 |
| 6163007 | Microwave plasma generating apparatus with improved heat protection of sealing O-rings | Tsutomu Tanaka, Chau Nguyen, Hari Ponnekanti, Kevin Fairbairn | 2000-12-19 |
| 4941340 | Method of fabricating wall fasteners | Edward J. Smith, Eustathios Vassiliou | 1990-07-17 |
| 4874277 | Wall fastener and method of fabrication | Edward J. Smith, Eustathios Vassiliou | 1989-10-17 |