Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6329297 | Dilute remote plasma clean | Thomas Nowak, Tsutomu Tanaka, Mark J. Beals | 2001-12-11 | $106,834,000 |
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Skip to contentShowing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6329297 | Dilute remote plasma clean | Thomas Nowak, Tsutomu Tanaka, Mark J. Beals | 2001-12-11 | $106,834,000 |