Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6329297 | Dilute remote plasma clean | Thomas Nowak, Tsutomu Tanaka, Mark J. Beals | 2001-12-11 | $106,834,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6329297 | Dilute remote plasma clean | Thomas Nowak, Tsutomu Tanaka, Mark J. Beals | 2001-12-11 | $106,834,000 |