Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8318590 | Methods and systems for forming thin films | Philip Allan Kraus, Thai Cheng Chua | 2012-11-27 |
| 8183132 | Methods for fabricating group III nitride structures with a cluster tool | Brian H. Burrows, Tetsuya Ishikawa, Olga Kryliouk, Anand Vasudev, Jie Su +6 more | 2012-05-22 |
| 8143147 | Methods and systems for forming thin films | Philip Allan Kraus, Thai Cheng Chua | 2012-03-27 |
| 7976631 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2011-07-12 |
| 7781016 | Method for measuring precursor amounts in bubbler sources | Ronald Stevens, Brendan McDougall, Jacob Smith, Garry K. Kwong, Lori D. Washington | 2010-08-24 |
| 7674352 | System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus | David P. Bour, Lori D. Washington, Ronald Stevens, Jacob Smith, Alexander Tam +5 more | 2010-03-09 |
| 7585769 | Parasitic particle suppression in growth of III-V nitride films using MOCVD and HVPE | David P. Bour, Jacob Smith, Lori D. Washington, David Eaglesham | 2009-09-08 |
| 7575982 | Stacked-substrate processes for production of nitride semiconductor structures | David P. Bour, Lori D. Washington, Jacob Smith, David Eaglesham | 2009-08-18 |
| 7560364 | Dislocation-specific lateral epitaxial overgrowth to reduce dislocation density of nitride films | David P. Bour, Jacob Smith, Lori D. Washington | 2009-07-14 |
| 7534714 | Radial temperature control for lattice-mismatched epitaxy | Lori D. Washington, David K. Carlson | 2009-05-19 |
| 7470599 | Dual-side epitaxy processes for production of nitride semiconductor structures | David Eaglesham, Lori D. Washington, David P. Bour, Jacob Smith | 2008-12-30 |
| 7399653 | Nitride optoelectronic devices with backside deposition | David P. Bour, Jacob Smith, Jie Su | 2008-07-15 |
| 7374960 | Stress measurement and stress balance in films | David P. Bour, Lori D. Washington, Jacob Smith | 2008-05-20 |
| 7364991 | Buffer-layer treatment of MOCVD-grown nitride structures | David P. Bour, Jacob Smith | 2008-04-29 |