Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7393439 | Integrated microfeature workpiece processing tools with registration systems for paddle reactors | Gregory J. Wilson, Daniel J. Woodruff, Nolan L. Zimmerman, James J. Erickson | 2008-07-01 |
| 7390383 | Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces | Gregory J. Wilson, Daniel J. Woodruff, Nolan L. Zimmerman, James J. Erickson | 2008-06-24 |
| 7390382 | Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods | Gregory J. Wilson, Daniel J. Woodruff, Nolan L. Zimmerman, James J. Erickson | 2008-06-24 |
| 7371998 | Thermal wafer processor | Randy Harris, Gregory J. Wilson | 2008-05-13 |
| 7332066 | Apparatus and method for electrochemically depositing metal on a semiconductor workpiece | Linlin Chen, Gregory J. Wilson, Robert A. Weaver, Thomas Ritzdorf | 2008-02-19 |
| 7267749 | Workpiece processor having processing chamber with improved processing fluid flow | Gregory J. Wilson, Kyle M. Hanson | 2007-09-11 |
| 7264698 | Apparatus and methods for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Thomas Ritzdorf, Gregory J. Wilson | 2007-09-04 |
| 7252714 | Apparatus and method for thermally controlled processing of microelectronic workpieces | Kyle M. Hanson, Robert W. Batz, Jr., Rajesh Baskaran, Nolan L. Zimmerman, Zhongmin Hu +1 more | 2007-08-07 |
| 7247223 | Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces | Gregory J. Wilson, Kyle M. Hanson | 2007-07-24 |
| 7189318 | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Gregory J. Wilson, Robert A. Weaver, Thomas Ritzdorf | 2007-03-13 |
| 7160421 | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Gregory J. Wilson, Robert A. Weaver, Thomas Ritzdorf | 2007-01-09 |
| 7161689 | Apparatus and method for processing a microelectronic workpiece using metrology | Thomas Ritzdorf, Steve Eudy, Gregory J. Wilson | 2007-01-09 |
| 7115196 | Apparatus and method for electrochemically depositing metal on a semiconductor workpiece | Linlin Chen, Gregory J. Wilson, Robert A. Weaver, Thomas Ritzdorf | 2006-10-03 |
| 7102763 | Methods and apparatus for processing microelectronic workpieces using metrology | Thomas Ritzdorf, Steve Eudy, Gregory J. Wilson, Robert A. Weaver, Brian Aegerter +2 more | 2006-09-05 |
| 7020537 | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Gregory J. Wilson, Robert A. Weaver, Thomas Ritzdorf | 2006-03-28 |
| 6861027 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Robert A. Weaver, Gregory J. Wilson | 2005-03-01 |
| 6780374 | Method and apparatus for processing a microelectronic workpiece at an elevated temperature | Robert A. Weaver, Gregory J. Wilson | 2004-08-24 |
| 6747734 | Apparatus and method for processing a microelectronic workpiece using metrology | Thomas Ritzdorf, Steve Eudy, Gregory J. Wilson | 2004-06-08 |
| 6660137 | System for electrochemically processing a workpiece | Gregory J. Wilson, Kyle M. Hanson | 2003-12-09 |
| 6569297 | Workpiece processor having processing chamber with improved processing fluid flow | Gregory J. Wilson, Kyle M. Hanson | 2003-05-27 |
| 6565729 | Method for electrochemically depositing metal on a semiconductor workpiece | Linlin Chen, Gregory J. Wilson, Robert A. Weaver, Thomas Ritzdorf | 2003-05-20 |
| 6471913 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Robert A. Weaver, Gregory J. Wilson | 2002-10-29 |
| 6441350 | Temperature control system for a thermal reactor | Kevin Stoddard, Konstantinos Tsakalis | 2002-08-27 |
| 6428673 | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology | Thomas Ritzdorf, Steve Eudy, Gregory J. Wilson | 2002-08-06 |
| 6222164 | Temperature control system for a thermal reactor | Kevin Stoddard, Konstantinos Tsakalis | 2001-04-24 |