Issued Patents All Time
Showing 26–50 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081881 | Electroplating apparatus with membrane tube shield | Gregory J. Wilson, Roey Shaviv | 2018-09-25 |
| 10047453 | Electroplating apparatus | Daniel J. Woodruff, Gregory J. Wilson | 2018-08-14 |
| 9920448 | Inert anode electroplating processor and replenisher with anionic membranes | Gregory J. Wilson | 2018-03-20 |
| 9859135 | Substrate rinsing systems and methods | Jonathan Frankel, Brian J. Brown, Vincent Steffan Francischetti, Kyle M. Hanson, Ekaterina A. Mikhaylichenko | 2018-01-02 |
| 9765443 | Electroplating processor with current thief electrode | Gregory J. Wilson | 2017-09-19 |
| 9758897 | Electroplating apparatus with notch adapted contact ring seal and thief electrode | Gregory J. Wilson | 2017-09-12 |
| 9689082 | Electroplating wafers having a notch | Gregory J. Wilson | 2017-06-27 |
| 9469911 | Electroplating apparatus with membrane tube shield | Gregory J. Wilson, Roey Shaviv | 2016-10-18 |
| 9359683 | Method of forming metal and metal alloy features | Bioh Kim, Marvin L. Bernt, Greg Wilson | 2016-06-07 |
| 9222195 | Electroplating systems and methods for high sheet resistance substrates | Gregory J. Wilson | 2015-12-29 |
| 9099297 | Electrochemical processor | Gregory J. Wilson | 2015-08-04 |
| 8968533 | Electroplating processor with geometric electrolyte flow path | Randy Harris, Daniel J. Woodruff, Jeffrey I. Turner, Gregory J. Wilson | 2015-03-03 |
| 8968531 | Electro processor with shielded contact ring | Gregory J. Wilson | 2015-03-03 |
| 8900425 | Contact ring for an electrochemical processor | Randy Harris, Gregory J. Wilson | 2014-12-02 |
| 8496789 | Electrochemical processor | Gregory J. Wilson, Kyle M. Hanson | 2013-07-30 |
| 8496790 | Electrochemical processor | Gregory J. Wilson | 2013-07-30 |
| 8313631 | Apparatus and methods for electrochemical processing of microfeature wafers | Gregory J. Wilson, Daniel J. Woodruff | 2012-11-20 |
| 7935230 | Electro-chemical processor | Daniel J. Woodruff, Gregory J. Wilson, Kyle M. Hanson, Nigel Stewart, Erik Lund +1 more | 2011-05-03 |
| 7931786 | Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces | Gregory J. Wilson, Daniel J. Woodruff | 2011-04-26 |
| 7927469 | Electro-chemical processor | Nigel Stewart, Daniel J. Woodruff, Gregory J. Wilson, Kyle M. Hanson, Erik Lund +1 more | 2011-04-19 |
| 7909967 | Electro-chemical processor | Daniel J. Woodruff, Gregory J. Wilson, Kyle M. Hanson, Erik Lund, Steven L. Peace | 2011-03-22 |
| 7857958 | Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces | Gregory J. Wilson, Kyle M. Hanson | 2010-12-28 |
| 7842173 | Apparatus and methods for electrochemical processing of microfeature wafers | Gregory J. Wilson, Daniel J. Woodruff | 2010-11-30 |
| 7566386 | System for electrochemically processing a workpiece | Gregory J. Wilson, Kyle M. Hanson | 2009-07-28 |
| 7438788 | Apparatus and methods for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Thomas Ritzdorf, Gregory J. Wilson | 2008-10-21 |