Issued Patents All Time
Showing 76–87 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664154 | Method of using amorphous carbon film as a sacrificial layer in replacement gate integration processes | Scott A. Bell, Srikanteswara Dakshina-Murthy, Philip A. Fisher | 2003-12-16 |
| 6656749 | In-situ monitoring during laser thermal annealing | Eric N. Paton, Robert B. Ogle, Bin Yu, Qi Xiang | 2003-12-02 |
| 6654659 | Quartz crystal monitor wafer for lithography and etch process monitoring | Christopher F. Lyons | 2003-11-25 |
| 6645797 | Method for forming fins in a FinFET device using sacrificial carbon layer | Matthew S. Buynoski, Srikanteswara Dakshina-Murthy, Haihong Wang, Chih-Yuh Yang, Bin Yu | 2003-11-11 |
| 6605514 | Planar finFET patterning using amorphous carbon | Scott A. Bell, Srikanteswara Dakshina-Murthy | 2003-08-12 |
| 6599766 | Method for determining an anti reflective coating thickness for patterning a thin film semiconductor layer | Chih-Yuh Yang, Minh Van Ngo | 2003-07-29 |
| 6579809 | In-situ gate etch process for fabrication of a narrow gate transistor structure with a high-k gate dielectric | Chih-Yuh Yang | 2003-06-17 |
| 6563183 | Gate array with multiple dielectric properties and method for forming same | William G. En, Arvind Halliyal, Minh-Ren Lin, Minh Van Ngo, Chih-Yuh Yang | 2003-05-13 |
| 6559017 | Method of using amorphous carbon as spacer material in a disposable spacer process | David E. Brown, Philip A. Fisher, Richard J. Huang, Richard Nguyen | 2003-05-06 |
| 6555439 | Partial recrystallization of source/drain region before laser thermal annealing | Qi Xiang, Robert B. Ogle, Eric N. Paton, Bin Yu | 2003-04-29 |
| 6551888 | Tuning absorption levels during laser thermal annealing | Eric N. Paton, Bin Yu, Qi Xiang, Robert B. Ogle | 2003-04-22 |
| 6500756 | Method of forming sub-lithographic spaces between polysilicon lines | Scott A. Bell, Philip A. Fisher, Richard Nguyen | 2002-12-31 |