Issued Patents All Time
Showing 51–75 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8951342 | Methods for using porogens for low k porous organosilica glass films | Raymond Nicholas Vrtis, Jean Louise Vincent, Aaron Scott Lukas, Mary Kathryn Haas | 2015-02-10 |
| 8940648 | Process for producing silicon and oxide films from organoaminosilane precursors | Manchao Xiao, Xinjian Lei, Heather Regina Bowen | 2015-01-27 |
| 8912353 | Organoaminosilane precursors and methods for depositing films comprising same | Manchao Xiao, Heather Regina Bowen, Hansong Cheng, Xinjian Lei | 2014-12-16 |
| 8889235 | Dielectric barrier deposition using nitrogen containing precursor | Anupama Mallikarjunan, Raymond Nicholas Vrtis, Laura M. Matz, Andrew David Johnson, Manchao Xiao | 2014-11-18 |
| 8846522 | Materials and methods of forming controlled void | Raymond Nicholas Vrtis, Dingjun Wu, Mark Daniel Bitner, Jean Louise Vincent, Eugene Joseph Karwacki, Jr. +1 more | 2014-09-30 |
| 8771807 | Organoaminosilane precursors and methods for making and using same | Manchao Xiao, Xinjian Lei, Bing Han, Ronald Martin Pearlstein, Richard Ho +2 more | 2014-07-08 |
| 8759563 | Low-impurity organosilicon product as precursor for CVD | Steven Gerard Mayorga, Kelly Ann Chandler | 2014-06-24 |
| 8703624 | Dielectric films comprising silicon and methods for making same | Liu Yang, Manchao Xiao, Kirk Scott Cuthill, Bing Han | 2014-04-22 |
| 8703625 | Methods to prepare silicon-containing films | Liu Yang, Manchao Xiao, Bing Han, Kirk Scott Cuthill | 2014-04-22 |
| 8637396 | Dielectric barrier deposition using oxygen containing precursor | Laura M. Matz, Raymond Nicholas Vrtis, Dino Sinatore | 2014-01-28 |
| 8530361 | Process for producing silicon and oxide films from organoaminosilane precursors | Manchao Xiao, Xinjian Lei, Heather Regina Bowen | 2013-09-10 |
| 8460753 | Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes | Manchao Xiao, Liu Yang, Kirk Scott Cuthill, Heather Regina Bowen, Bing Han | 2013-06-11 |
| 8440099 | Stabilizers for the stabilization of unsaturated hydrocarbon-based precursor | Steven Gerard Mayorga, Kelly Ann Chandler, Mary Kathryn Haas, Dino Sinatore | 2013-05-14 |
| 8399349 | Materials and methods of forming controlled void | Raymond Nicholas Vrtis, Dingjun Wu, Mark Daniel Bitner, Jean Louise Vincent, Eugene Joseph Karwacki, Jr. +1 more | 2013-03-19 |
| 8329933 | Low-impurity organosilicon product as precursor for CVD | Steven Gerard Mayorga, Kelly Ann Chandler | 2012-12-11 |
| 8293001 | Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants | Raymond Nicholas Vrtis, Jean Louise Vincent, Aaron Scott Lukas, Manchao Xiao, John Anthony Thomas Norman | 2012-10-23 |
| 8283260 | Process for restoring dielectric properties | Scott J. Weigel, Mary Kathryn Haas, Laura M. Matz, Glenn Michael Mitchell, Aiping Wu +2 more | 2012-10-09 |
| 8173213 | Process stability of NBDE using substituted phenol stabilizers | Steven Gerard Mayorga, Mary Kathryn Haas, Dino Sinatore | 2012-05-08 |
| 8137764 | Mechanical enhancer additives for low dielectric films | Jean Louise Vincent, Raymond Nicholas Vrtis, Aaron Scott Lukas, Brian K. Peterson, Mark Daniel Bitner | 2012-03-20 |
| 8043976 | Adhesion to copper and copper electromigration resistance | Raymond Nicholas Vrtis, Laura M. Matz | 2011-10-25 |
| 7999355 | Aminosilanes for shallow trench isolation films | Scott J. Weigel, Bing Han, Hansong Cheng, Manchao Xiao, Chia-Chien Lee | 2011-08-16 |
| 7977121 | Method and composition for restoring dielectric properties of porous dielectric materials | Dnyanesh Chandrakant Tamboli, Madhukar Bhaskara Rao | 2011-07-12 |
| 7943195 | Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants | Raymond Nicholas Vrtis, Jean Louise Vincent, Aaron Scott Lukas, Manchao Xiao, John Anthony Thomas Norman | 2011-05-17 |
| 7932188 | Mechanical enhancement of dense and porous organosilicate materials by UV exposure | Aaron Scott Lukas, Jean Louise Vincent, Raymond Nicholas Vrtis, Mark Daniel Bitner, Eugene Joseph Karwacki, Jr. | 2011-04-26 |
| 7581549 | Method for removing carbon-containing residues from a substrate | Andrew David Johnson, Hoshang Subawalla, Bing Ji, Raymond Nicholas Vrtis, Eugene Joseph Karwacki, Jr. +4 more | 2009-09-01 |