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Non-thermal process for forming porous low dielectric constant films |
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2008-12-30 |
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Mechanical enhancement of dense and porous organosilicate materials by UV exposure |
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Non-thermal process for forming porous low dielectric constant films |
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2008-07-29 |
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Mechanical enhancement of dense and porous organosilicate materials by UV exposure |
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Low dielectric constant material and method of processing by CVD |
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2006-07-11 |