Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127727 | Thermal spreading management of 3D stacked integrated circuits | Robert L. Sankman, Pooya Tadayon, Weihua Tang, Chandra Mohan Jha | 2021-09-21 |
| 10361059 | Magnetic field fluctuation for beam smoothing | Xiao Bai, Donald W. Berrian | 2019-07-23 |
| 9852887 | Ion source of an ion implanter | Stephen E. Savas, Xiao Bai, Peter M. Kopalidis | 2017-12-26 |
| 9824850 | Deceleration apparatus for ribbon and spot beams | Nicholas R. White, Erik Collart | 2017-11-21 |
| 9748072 | Lower dose rate ion implantation using a wider ion beam | Rekha Padmanabhan, Xiao Bai, Gary N. Cai, Ching-I Li, Ger-Pin Lin +4 more | 2017-08-29 |
| 9697988 | Ion implantation system and process | Kourosh Saadatmand, Nicholas R. White | 2017-07-04 |
| 9450078 | Forming punch-through stopper regions in finFET devices | Daniel Tang, Ching-I Li, Ger-Pin Lin | 2016-09-20 |
| 9431247 | Method for ion implantation | Kourosh Saadatmand, Wilhelm P. Platow, Ger-Pin Lin, Ching-I Li, Rekha Padmanabhan +1 more | 2016-08-30 |
| 9340870 | Magnetic field fluctuation for beam smoothing | Xiao Bai, Donald W. Berrian | 2016-05-17 |
| 9147550 | Gas mixture method and apparatus for generating ion beam | Wei-Cheng Lin, Koulin Hu | 2015-09-29 |
| 9117629 | Multi-energy ion implantation | — | 2015-08-25 |
| 9057129 | Implant method and implanter by using a variable aperture | John D. Pollock, Donald W. Berrian, Causon Ko-Chuan Jen | 2015-06-16 |
| 9009939 | Method and system for moving wafer during scanning the wafer | Peter Mok, Ko-Chuan Jen | 2015-04-21 |
| 8987691 | Ion implanter and ion implant method thereof | John D. Pollock, Don Berrian | 2015-03-24 |
| 8941077 | Deceleration apparatus for ribbon and spot beams | Nicholas R. White, Erik Collart | 2015-01-27 |
| 8907301 | Gas mixture method for generating ion beam | Koulin Hu, Wei-Cheng Lin | 2014-12-09 |
| 8890506 | Apparatus and method for measuring ion beam current | Peter M. Kopalidis | 2014-11-18 |
| 8835882 | Real time monitoring ion beam | Wei-Cheng Lin | 2014-09-16 |
| 8673753 | Multi-energy ion implantation | — | 2014-03-18 |
| 8669539 | Implant method and implanter by using a variable aperture | John D. Pollock, Don Berrian, Causon Ko-Chuan Jen | 2014-03-11 |
| 8653807 | Apparatus and method for measuring ion beam current | Peter M. Kopalidis | 2014-02-18 |
| 8334517 | Apparatus for adjusting ion beam by bended bar magnets | Ko-Chuan Jen | 2012-12-18 |
| 8304330 | Method for low temperature ion implantation | John D. Pollock, Erik Collart | 2012-11-06 |
| 8124508 | Method for low temperature ion implantation | John D. Pollock, Erik Collart | 2012-02-28 |
| 8039374 | Method for low temperature ion implantation | John D. Pollock, Erik Collart | 2011-10-18 |