Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9009939 | Method and system for moving wafer during scanning the wafer | Peter Mok, Zhimin Wan | 2015-04-21 |
| 8334517 | Apparatus for adjusting ion beam by bended bar magnets | Zhimin Wan | 2012-12-18 |
| 7807986 | Ion implanter and method for adjusting ion beam | York Yang, Zhimin Wan | 2010-10-05 |
| 7750323 | Ion implanter and method for implanting a wafer | Zhimin Wan, Cheng-Hui Shen | 2010-07-06 |
| 7709364 | Method and apparatus for low temperature ion implantation | Cheng-Hui Shen | 2010-05-04 |