Issued Patents 2025
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432461 | Smart camera substrate | Upendra Ummethala, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2025-09-30 |
| 12406837 | Reaction cell for species sensing | Abdullah Zafar, Kelvin Chan | 2025-09-02 |
| 12368024 | Methods and apparatus for processing a substrate | Abdullah Zafar, William J. Durand, Xinyuan Chong, Kenric Choi, Weize Hu +4 more | 2025-07-22 |
| 12340978 | Symmetric and irregular shaped plasmas using modular microwave sources | Thai Cheng Chua, Farzad Houshmand, Christian Amormino | 2025-06-24 |
| 12315739 | Isotropic silicon nitride removal | Mikhail Korolik, Paul Edward Gee, Wei Ying Doreen Yong, Tuck Foong Koh, John Sudijono +1 more | 2025-05-27 |
| 12300497 | Method and apparatus of low temperature plasma enhanced chemical vapor deposition of graphene | Thai Cheng Chua, Christian Valencia, Chikuang Charles Wang, Bencherki Mebarki, Hanh Nguyen | 2025-05-13 |
| 12228534 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati +2 more | 2025-02-18 |
| 12216015 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | Chuang-Chia Lin, David Peterson, Amir Bayati | 2025-02-04 |
| 12198966 | Substrate support with multiple embedded electrodes | Thai Cheng Chua, Jaeyong Cho | 2025-01-14 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik +1 more | 2025-01-07 |