Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432461 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2025-09-30 |
| 12405164 | Spatial optical emission spectroscopy for etch uniformity | Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more | 2025-09-02 |
| 12283503 | Substrate measurement subsystem | Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2025-04-22 |
| 12191176 | Integrated substrate measurement system to improve manufacturing process performance | Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2025-01-07 |