Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405164 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Keith R. Berding, Michael Kutney, Tsung Feng Wu, Michael D. Willwerth +1 more | 2025-09-02 |
| 12339645 | Estimation of chamber component conditions using substrate measurements | Chunlei Zhang, Michael Kutney | 2025-06-24 |
| 12283503 | Substrate measurement subsystem | Upendra Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel | 2025-04-22 |
| 12216455 | Chamber component condition estimation using substrate measurements | Chunlei Zhang, Michael Kutney | 2025-02-04 |
| 12191176 | Integrated substrate measurement system to improve manufacturing process performance | Upendra Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel | 2025-01-07 |