Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370573 | Equipment front end modules with induced gas mixing, and methods of use thereof | Paul B. Reuter | 2025-07-29 |
| 12283503 | Substrate measurement subsystem | Upendra Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Zhaozhao Zhu | 2025-04-22 |
| 12191176 | Integrated substrate measurement system to improve manufacturing process performance | Upendra Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Zhaozhao Zhu | 2025-01-07 |