Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405164 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu +1 more | 2025-09-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405164 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu +1 more | 2025-09-02 |