Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432461 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Devendra Channappa Holeyannavar +4 more | 2025-09-30 |
| 12418972 | Confocal chromatic metrology for EUV source condition monitoring | Caijun Su, Ravichandra Jagannath, Brian Ahr | 2025-09-16 |