Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12418972 | Confocal chromatic metrology for EUV source condition monitoring | Patrick Tae, Caijun Su, Ravichandra Jagannath | 2025-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12418972 | Confocal chromatic metrology for EUV source condition monitoring | Patrick Tae, Caijun Su, Ravichandra Jagannath | 2025-09-16 |