Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228534 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Yaoling Pan, Kelvin Chan, Amir Bayati, Philip Allan Kraus +2 more | 2025-02-18 |
| 12224156 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Xiaopu Li, Jozef Kudela, Tsutomu Tanaka, Dmitry A. Dzilno | 2025-02-11 |